Alcatel ATH 1300M Adixen Turbomolecular Vacuum Pump

The Alcatel ATH 1300M Adixen turbomolecular vacuum pump is a high-performance, oil-free vacuum solution engineered for demanding industrial and scientific applications requiring deep vacuum levels in the 10^-7 to 10^-9 mbar range. Manufactured in France by Alcatel Vacuum Technology (now part of the Pfeiffer Vacuum group through the Adixen brand legacy), this turbomolecular pump delivers the pumping speed, compression ratio, and contamination-free operation essential for semiconductor fabrication, electron microscopy, mass spectrometry, aerospace simulation, and research laboratory environments.

The Alcatel ATH 1300M represents one of the most compelling value propositions in the high vacuum equipment market. New turbomolecular pumps of comparable specification typically command prices of $25,000 to $45,000+ from authorized distributors — meaning this unit delivers 60%+ cost savings while providing the identical vacuum performance and French manufacturing quality that made Alcatel/Adixen a trusted name in vacuum technology for over five decades.

With part codes AHS1221 / MABQ16DFAT / 9901611, a mass of 34.3 kg, and compatibility with standard high-vacuum system configurations, the ATH 1300M is ready for integration into your existing vacuum chamber, deposition system, or analytical instrument setup. Aeliya Marine Tech provides a 30-day warranty, free worldwide shipping, and 5 detailed product photographs so you can purchase with complete confidence in the pump's condition and authenticity.

Product Overview: Alcatel ATH 1300M Adixen Turbomolecular Vacuum Pump

Turbomolecular pumps operate on a fundamentally different principle than traditional oil-sealed rotary vane or diffusion pumps. Using a high-speed turbine rotor spinning at tens of thousands of RPM, the ATH 1300M transfers momentum to gas molecules, compressing them from the high-vacuum inlet to the fore-vacuum exhaust port where a backing pump (typically a rotary vane or diaphragm pump) handles final evacuation. This molecular drag mechanism achieves oil-free, contamination-free high vacuum — a critical requirement for semiconductor processing, surface science, and any application where hydrocarbon backstreaming would compromise results.

The Alcatel ATH series turbomolecular pumps are recognized throughout the vacuum industry for their rugged construction, high pumping speed, and long bearing life. The 1300M designation indicates a pump with approximately 1300 L/s nominal pumping speed for nitrogen (N₂), making it suitable for medium-to-large vacuum chambers and high-gas-load applications. The "M" variant typically signifies a specific bearing configuration or motor specification optimized for industrial duty cycles.

What distinguishes the ATH 1300M from competing turbomolecular pumps is Alcatel's proprietary magnetic levitation or hybrid ceramic ball bearing suspension system (exact configuration varies by sub-model), which minimizes vibration transmission to the vacuum chamber and extends operational lifespan compared to conventional oil-lubricated bearing designs. The result is a pump that delivers not only deep vacuum but also the mechanical stability required for sensitive instrumentation and precision manufacturing processes.

Technical Specifications

Key Features & Benefits

• 1300 L/s Pumping Speed (N₂): High throughput capacity for medium-to-large vacuum chambers, rapid pump-down cycles, and high gas-load processing applications. Ideal for semiconductor wafer processing and large-volume vacuum deposition systems.
• Oil-Free Vacuum Generation: Turbomolecular pumping action eliminates hydrocarbon contamination from the vacuum stream. Essential for electron microscopy, mass spectrometry, and semiconductor fabrication where even trace contamination destroys process yield.
• Ultra-High Vacuum Capability: Achieves ultimate pressures in the 10^-9 to 10^-7 mbar range — the deep vacuum levels required for surface analysis, thin-film deposition, and space simulation applications.
• French Manufacturing Quality: Manufactured by Alcatel Vacuum Technology in France to ISO 9001 quality standards. Renowned for precision engineering, long bearing life, and consistent performance over extended operational periods.
• Compact 34.3 kg Design: Relatively lightweight for its pumping capacity, simplifying installation on vacuum chambers, analytical instruments, and mobile vacuum cart configurations. No special floor loading requirements.
• Low Vibration Operation: Advanced bearing suspension system minimizes mechanical vibration transmitted to the vacuum chamber — critical for electron microscopy, lithography, and precision optical coating applications.
• Broad Gas Handling Capability: Effectively pumps light gases (hydrogen, helium) as well as heavy process gases (argon, SF₆) with high compression ratios across the molecular weight spectrum.
• Proven Industrial Reliability: The ATH series has demonstrated operational lifespans exceeding 20,000 hours in continuous industrial service when properly maintained, with bearing replacement as the primary scheduled service item.
• 60%+ Savings vs. New: This used ATH 1300M delivers identical vacuum performance to new units priced at $25,000–$45,000+, making high vacuum technology accessible to budget-conscious laboratories and production facilities.

Industrial Applications

The Alcatel ATH 1300M turbomolecular vacuum pump serves critical high-vacuum applications across industries where deep vacuum levels, contamination-free operation, and reliable gas handling are non-negotiable requirements. Based on our experience supplying vacuum equipment to research institutions and industrial facilities worldwide, here are the primary sectors:

Semiconductor & Microelectronics Manufacturing

Plasma etch, chemical vapor deposition (CVD), physical vapor deposition (PVD), and ion implantation systems all rely on turbomolecular pumps to maintain process chamber vacuums in the 10^-6 to 10^-9 Torr range. The ATH 1300M's high pumping speed for process gases and corrosive gas compatibility (with appropriate configuration) make it suitable for both front-end wafer processing and back-end packaging operations.

Electron Microscopy (SEM & TEM)

Scanning electron microscopes and transmission electron microscopes require high vacuum in the electron column and specimen chamber to prevent electron scattering and filament degradation. The ATH 1300M's low vibration characteristics and oil-free operation make it the pump of choice for electron microscope column evacuation and specimen chamber pumping.

Mass Spectrometry

Gas chromatography-mass spectrometry (GC-MS), inductively coupled plasma mass spectrometry (ICP-MS), and residual gas analyzers (RGA) all utilize turbomolecular pumps to achieve the high vacuum required for ion formation, separation, and detection. Contamination-free pumping is essential to prevent background signals from interfering with analytical accuracy.

Thin-Film Coating & Surface Engineering

Physical vapor deposition (sputtering, thermal evaporation, electron beam deposition) and molecular beam epitaxy (MBE) systems require stable high vacuum for controlled film growth. The ATH 1300M provides the pumping speed and compression ratio needed for reactive sputtering with argon/oxygen mixtures and other process gas combinations.

Space Simulation & Aerospace Testing

Thermal vacuum chambers used for satellite and spacecraft qualification testing require turbomolecular pumps to simulate the hard vacuum of space (10^-6 Torr and below). The ATH 1300M's proven reliability in continuous-duty applications makes it ideal for long-duration thermal cycling tests.

Research Laboratories & Universities

Surface science experiments (XPS, AES, STM), cryogenics research, particle accelerator beam lines, and fusion energy research (tokamak vacuum vessels) all utilize turbomolecular pumping systems. The cost-effectiveness of this used ATH 1300M makes advanced vacuum technology accessible to academic budgets.

Medical & Pharmaceutical

Freeze-drying (lyophilization) systems, electron beam sterilization, and medical device coating operations require clean, reliable high vacuum. The oil-free nature of turbomolecular pumping prevents product contamination in pharmaceutical manufacturing environments.

Why Buy From Aeliya Marine Tech?

Aeliya Marine Tech has supplied industrial vacuum equipment, marine systems, and process automation components to clients in over 120 countries since 2002. When you purchase this Alcatel ATH 1300M turbomolecular pump from us, you benefit from:

• 30-Day Functional Warranty: Every used turbomolecular pump undergoes visual inspection, bearing rotation verification, and connectivity testing before shipment. Our warranty covers operational defects for 30 days from delivery.
• Free Worldwide Shipping: We ship to 120+ countries via DHL, FedEx, and international freight. All vacuum pumps are packed in custom wooden crates with anti-vibration mounting and moisture barrier protection.
• 5 Detailed Product Images: High-resolution photographs show the pump body, inlet flange, electrical connections, nameplate/part codes, and any cosmetic wear — full transparency before you buy.
• Expert Technical Support: Our engineering team understands vacuum technology. We can advise on backing pump selection, controller compatibility, flange connections, and system integration for your specific application.
• 60%+ Cost Savings vs. New: This Alcatel ATH 1300M offers exceptional value. New turbomolecular pumps of similar specification retail from $25,000 to $45,000+, making this used unit the smart procurement choice.
• Proven Seller Track Record: Aeliya Marine Tech maintains a 4.8+ star customer rating with thousands of completed industrial equipment transactions. We specialize in hard-to-find legacy and used vacuum equipment.

How to Order & Installation Guide

Procuring and integrating your Alcatel ATH 1300M turbomolecular vacuum pump is straightforward with Aeliya Marine Tech:

Step 1: Place Your Order

Click "Add to Cart" and complete checkout. We accept wire transfer, major credit cards, and PayPal. Corporate purchase orders are accepted from established accounts — contact sales@aeliyamarine.com for PO terms.

Step 2: Pre-Shipment Preparation

Our technicians verify bearing rotation, inspect the inlet flange sealing surface, and confirm electrical connector integrity. We photograph the unit during inspection and email the report with tracking details within 24 hours of shipment.

Step 3: Unpack & Inspect

The pump arrives in a custom wooden crate. Carefully unpack and inspect for transit damage. Do not operate if damage is visible — contact us immediately for a damage claim.

Step 4: Mounting & Alignment

Install the ATH 1300M on a rigid support structure or vacuum system frame. Ensure the pump is level and mechanically isolated from vibration sources. The 34.3 kg mass requires adequate support but does not require special foundation work.

Step 5: System Connection

Connect the high-vacuum inlet flange to your chamber using a compatible ISO-K or ConFlat (CF) gasket and clamp system. Connect the exhaust port to your backing pump (rotary vane or diaphragm) via a flexible vacuum hose. Connect the power and control cables per Alcatel/Adixen documentation.

Step 6: Pump-Down Procedure

Start the backing pump first to establish fore-vacuum (typically 0.1 to 1 mbar). Once fore-vacuum is achieved, start the turbomolecular pump. Monitor the pump speed indicator and chamber pressure gauge. The ATH 1300M typically reaches full operational speed within 3–5 minutes.

Related Products You May Also Need

• Alcatel/Adixen Rotary Vane Backing Pumps – Fore-vacuum pumps required as backing pumps for turbomolecular systems
• High-Vacuum Flanges & Fittings (ISO-K, CF) – Connection hardware for inlet and exhaust flange interfaces
• Vacuum Gauges & Controllers – Pirani, Penning, and ionization gauges for system pressure monitoring
• Turbomolecular Pump Controllers & Cables – Frequency converters and interconnect cables for ATH series pumps

External Technical Resources

• Pfeiffer Vacuum Official Website – Successor to Alcatel/Adixen vacuum products, technical documentation, and application resources
• Wikipedia – Turbomolecular Pump – Comprehensive technical explanation of turbomolecular pump operating principles and applications
• ISO Standards Organization – International standards for vacuum technology terminology, measurement methods, and pump testing
• Leybold Vacuum Technology – Alternative manufacturer of turbomolecular pumps, comparison specifications, and vacuum application guides
• Agilent Vacuum Products Division – Former Varian Vacuum, provides turbomolecular pump technical resources and application notes

Frequently Asked Questions (FAQ)